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Nakanuma, Takato*; Kobayashi, Takuma*; Hosoi, Takuji*; Sometani, Mitsuru*; Okamoto, Mitsuo*; Yoshigoe, Akitaka; Shimura, Takayoshi*; Watanabe, Heiji*
Applied Physics Express, 15(4), p.041002_1 - 041002_4, 2022/04
Times Cited Count:5 Percentile:48.5(Physics, Applied)The leakage current and flat-band voltage (VFB) instability of NO-nitrided SiC (110) (a-face) MOS devices were systematically investigated. Although NO nitridation is effective in improving the interface properties, we found that it reduces the onset field of Fowler-Nordheim (F-N) current by about 1 MVcm, leading to pronounced leakage current. Synchrotron X-ray photoelectron spectroscopy revealed that the nitridation reduces the conduction band offset at the SiO/SiC interface, corroborating the above finding. Furthermore, systematical positive and negative bias stress tests clearly indicated the VFB instability of nitrided a-face MOS devices against electron and hole injection.
Chandrasekaran, N.*; Soga, Tetsuo*; Inuzuka, Yosuke*; Taguchi, Hironori*; Imaizumi, Mitsuru*; Oshima, Takeshi; Jimbo, Takashi*
Japanese Journal of Applied Physics, 43(10A), p.L1302 - L1304, 2004/10
Times Cited Count:6 Percentile:27.83(Physics, Applied)no abstracts in English
Oshima, Takeshi; Ito, Hisayoshi
Proceedings of the 6th International Workshop on Radiation Effects on Semiconductor Devices for Space Application (RASEDA-6), p.191 - 194, 2004/10
no abstracts in English
Ito, Hisayoshi; Oshima, Takeshi
Hyomen Kagaku, 21(12), p.778 - 783, 2000/12
no abstracts in English
Tanifuji, Takaaki; Katano, Yoshio; ; Noda, Kenji
Journal of Nuclear Materials, 253, p.156 - 166, 1998/00
Times Cited Count:5 Percentile:44.27(Materials Science, Multidisciplinary)no abstracts in English
Oshima, Takeshi
Nyu Seramikkusu, 10(5), p.20 - 27, 1997/05
no abstracts in English
Akutsu, Yoichi; Okawa, Yoshinao; Suzuki, Hideyuki; *; *; *
Nihon Kenchiku Gakkai Taikai Gakujutsu Koen Kogaishu, 0, p.1337 - 1338, 1995/00
no abstracts in English
Seguchi, Tadao; Yagi, Toshiaki; *; *; *; *; Nakamura, Hiroshi*; *; *
DEI-94-92, 0, p.37 - 45, 1994/12
no abstracts in English
*; *; Morita, Yosuke; Yagi, Toshiaki; Seguchi, Tadao
Denki Gakkai Yuden, Zetsuen Zairyo Kenkyukai Shiryo; DEI-94-91, 0, p.29 - 36, 1994/12
no abstracts in English
Morita, Yosuke; Seguchi, Tadao; Yoshida, Kenzo; *; *
EIM-84-129, p.9 - 18, 1984/00
no abstracts in English